Integrated parametric measurement solutions that do not compromise performance
Engineers and scientists working on current and future semiconductor process technologies frequently require an efficient means to characterize wafers with high accuracy in a low-volume test environment. The Agilent 41000 Series or integrated parametric analysis and characterization environment (iPACE) provides an effective solution to meet this challenge.
The 41000 Series solution solves the most common challenges facing parametric instrument users who require high-resolution 1 fA performance all the way to the interface of the probe card needle and the wafer. Four standard 41000 Series configurations come pre-racked and cabled. Two are positioner-based solutions and two include a new high-performance switching matrix with a new probe card interface. These integrated solutions eliminate the tedious and confusing job of racking, cabling, and verifying the performance of parametric instruments.
With the 41000 Series' advanced switching matrix users can perform 1 fA, low-volume capacitance versus voltage (CV) characterization and current versus voltage (IV) characterization of wafers in development lab environments. There is also support for full Kelvin measurements using 4 SMUs or CV measurements, using the same setup.
Advanced switching matrix and probe card technology enable Agilent to initially offer two probe card-based solutions, in 1 fA and 10 fA measurement performance versions. Each standard configuration also allows users to add a wide range of options. All versions of the 41000 Series can also support CV measurement using an optional capacitance meter (initially the Agilent 4284A, with others to be added later).
The Agilent 41000 Series offers a new solution that fills the gap between expensive production-level testers and the low performance, user-created instrument solutions.
- 1 fA measurements through a switching matrix
The Agilent 41000 Series allows engineers and scientists doing wafer characterization in development lab environments to make highly accurate measurements through a switching matrix and probe card without any compromise in the performance of their semiconductor parameter analyzers. Resolution of 1 fA is maintained all the way to the interface of the probe card needle and the wafer.
The new B2200 and B2201 low-leakage switching matrices, which form the core of the 41000 Series solution, enable respective measurements of 1 fA and 10 fA to be made through them. When combined with the B2220 probe card interface and Agilent's advanced low-leakage probe card expertise, this unequaled measurement performance allows the full measurement potential of semiconductor parameter analyzers (4155C, 4156C, or E5270B) to be realized. This integration eliminates the arduous task of building a custom instrument solution and ensures that the performance standards of the parameter analyzer are maintained. - Support for CV and IV measurements through positioners
Prior to the introduction of the 41000 Series, switching between CV and IV measurements using positioners required manual disconnection and reconnection of the parameter analyzer cables and C meter cables. The 41000 Series' patented E5288A atto-sense and switch unit (for the E5270B) parameter analyzer) and the B2200/B2201 switching matrices enable you to switch between CV and IV measurements simply by issuing a few software commands. - Support for full Kelvin measurements using 4 SMUs
The new, patented switching matrix has 14 inputs (8 triaxial and 6 BNC). Each input corresponds to a unique internal path, which offers the highest level of flexibility by eliminating the need to multiplex inputs. The 8 triaxial inputs support full Kelvin measurements (force and sense) using 4 SMUs. Two dedicated BNC inputs are available for CV measurements on the same setup while the 4 remaining BNC inputs provide flexibility for future expansion. This level of automation dramatically increases test efficiency. - Support for CV measurements with built-in compensation
Models 200, 300 and 400 of the 41000 Series use the B2200 and B2201 switching matrices, which have built-in compensation features for CV measurement data.
Features and Benefits
| Feature | Benefit |
|---|---|
| Integrated switching matrix, probe card interface, and probe card | Enables automation of wafer characterization without compromising the 1 fA measurement performance of the semiconductor parameter analyzer. Details |
| B2200 and B2201 switching matrices have 8 triaxial and 6 BNC inputs | Allows utilization all of the measurement resources of the semiconductor parameter analyzer. Details |
| Atto sense unit (ASU) | Easy to switch between CV and IV measurements; no need to physically change cabling or move to a different probe station; 100 aA resolution |
| Complete, integrated solution | Simpler, less expensive alternative that is optimized for use in wafer characterization environments. |
Components
- 4155C, 4156C, or E5270B Semiconductor Parameter Analyzers
- E5288A Atto Sense & Switch Unit (for the E5270B)
- B2200A/B2201A Low Leakage Switching Matrices
- B2220A Wafer Prober Interface (24 pins or 48 pins)
- 1.6 m rack with PDU and EMO (PDU & EMO are optional)
- 4284A C Meter (optional)
Options
41000 Model 100: Ultra-Precision (0.1 fA/0.5µV) CV/IV Measurement (Available late 2004)
41000 Model 200: Precision (1 fA/0.5µV) CV/IV Measurement (Available late 2004)
° Analyzers option (4155C, 4156C and 5270B)
° 4284A C Meter (optional)
° PDU/EMO (optional)
41000 Model 300: 1 fA/0.5µV General Purpose CV/IV Measurement
° Analyzers option (4156C or 5270B) Model 400 only
° Probe Card I/F Pins (24 or 48)
° Kelvin ch numbers (0-8)
° 4284A C Meter (optional)
° PDU/EMO (optional)
41000 Model 400: 10 fA/0.5µV General Purpose CV/IV Measurement
° Analyzers option (4155C, 4156C or 5270B) Model 400 only
° Probe Card I/F Pins (24 or 48)
° Kelvin ch numbers (0-8)
° 4284A C Meter (optional)
° PDU/EMO (optional)
Key Specifications
| Current Measurement Resolution (Model 100) [Model 100 available late 2004] |
0.1 femto-Amps (100 atto-Amps) |
| Current Measurement Resolution (Model 200, 300) [Model 200 available late 2004] |
1.0 femto-Amps |
| Current Measurement Resolution (Model 400) | 10.0 femto-Amps |
| Voltage Measurement Resolution (All 4155C and 4156C option based Models) |
0.2 micro-Volts |
| Voltage Measurement Resolution (All E5270B HRSMU and MPSMU option based Models) |
0.5 micro-Volts |
| Probe Card I/F Pins | 24 or 48 |
| Kelvin Channels | 0 to 4 |
| C Measurement (Optional) | 1MHz (4284A) |
| PDU Voltage (Optional) |
